Measurement error caused by white-light spectrum in fringe scanning interferometry

Jiabi Chen; Bichun Zhou

doi:10.1117/12.182164

5 August 1994 Measurement error caused by white-light spectrum in fringe scanning interferometry

Jiabi Chen, Bichun Zhou

Proceedings Volume 2321, Second International Conference on Optoelectronic Science and Engineering '94; (1994) https://doi.org/10.1117/12.182164
Event: Optoelectronic Science and Engineering '94: International Conference, 1994, Beijing, China

Abstract

The measurement error caused by white-light spectrum in fringe scanning interferometry is a principle error. This paper presents the analysis of the error and results of computer simulation, which shows that the error is about 20% of measured phase and could not be ignored. Since the error is about linear, the compensation is simply to multiply a constant coefficient.

Citation Download Citation

Jiabi Chen and Bichun Zhou "Measurement error caused by white-light spectrum in fringe scanning interferometry", Proc. SPIE 2321, Second International Conference on Optoelectronic Science and Engineering '94, (5 August 1994); https://doi.org/10.1117/12.182164

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