Numerical analysis of high-resolution microlithography with thermoresist

Kenji Amaya

doi:10.1117/12.351109

25 June 1999 Numerical analysis of high-resolution microlithography with thermoresist

Kenji Amaya

Proceedings Volume 3676, Emerging Lithographic Technologies III; (1999) https://doi.org/10.1117/12.351109
Event: Microlithography '99, 1999, Santa Clara, CA, United States

Abstract

Numerical simulation was performed on a new high resolution micro-lithography using thermo-resist. This high resolution optical-thermal lithography uses a thermo-resist instead of photoresist taking advantage of a nonlinear superposition effect. The nonlinear superposition utilizes the fact that thermo-resists do not follow the reciprocity law. This phenomena allows to separate a complex image into simple sub-sets which are imaged onto the same die. This concept will realize a fabrication of 100nm features with existing steppers and without and proximity effects. Hopkin's 4D integral is used for calculations of the diffraction intensity of projection image. Intensity of impressed heat flux is assumed to be proportional to the intensity of this diffraction image. Transient heat transfer in wafer and layer of thermo-resist is analyzed by non-linear 3D finite element method. The numerical result demonstrates a drastic improvement in resolution that can be obtained with conventional method using photo-resist.

Citation Download Citation

Kenji Amaya "Numerical analysis of high-resolution microlithography with thermoresist", Proc. SPIE 3676, Emerging Lithographic Technologies III, (25 June 1999); https://doi.org/10.1117/12.351109

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available