Full Content is available to subscribers

Subscribe/Learn More  >
Proceedings Article

Picosecond ultrasonic characterization of Mo/Si multilayers for extreme ultraviolet lithography

[+] Author Affiliations
Nen-Wen Pu, Rian Zhao, Jeffrey Bokor

Univ. of California/Berkeley (USA)

Seongtae Jeong

Lawrence Berkeley National Lab (USA)

Proc. SPIE 3676, Emerging Lithographic Technologies III, 627 (June 25, 1999); doi:10.1117/12.351136
Text Size: A A A
From Conference Volume 3676

  • Emerging Lithographic Technologies III
  • Yuli Vladimirsky
  • Santa Clara, CA | March 14, 1999

abstract

We have used picosecond ultrasonic techniques as a nondestructive detection tool to characterize Mo/Si multilayer reflectors for EUV. The lowest two localized acoustic-phonon surface modes were simultaneously observed in our samples with various d and (Gamma) values. The vibration frequencies of these surface modes depend both on d and (Gamma) , and can be used to extract these two parameters. We mapped the thickness profile of a linearly graded Mo/Si multilayer sample with 2 percent d-variation from the two edges towards the center. The dependence of the vibration frequencies on (Gamma) was also studied theoretically and experimentally, and was found to be separable from the dependence on d.

© (1999) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Nen-Wen Pu ; Seongtae Jeong ; Rian Zhao and Jeffrey Bokor
"Picosecond ultrasonic characterization of Mo/Si multilayers for extreme ultraviolet lithography", Proc. SPIE 3676, Emerging Lithographic Technologies III, 627 (June 25, 1999); doi:10.1117/12.351136; http://dx.doi.org/10.1117/12.351136


Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).

Figures

Tables

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.