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Proceedings Article

EUV scattering and flare of 10X projection cameras

[+] Author Affiliations
Eric M. Gullikson, Jeffrey Bokor, Kenneth A. Goldberg, Patrick P. Naulleau, James H. Underwood

Lawrence Berkeley National Lab. (USA)

Sherry L. Baker, Claude Montcalm, Eberhard A. Spiller, John S. Taylor

Lawrence Livermore National Lab. (USA)

John E. Bjorkholm

Intel Corp. (USA)

John E. M. Goldsmith

Sandia National Labs. (USA)

Daniel G. Stearns

OS Associates (USA)

Proc. SPIE 3676, Emerging Lithographic Technologies III, 717 (June 25, 1999); doi:10.1117/12.351162
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From Conference Volume 3676

  • Emerging Lithographic Technologies III
  • Yuli Vladimirsky
  • Santa Clara, CA | March 14, 1999

abstract

Two new Schwarzschild cameras have been fabricated for the EUV 10x microstepper. The surface topography of the mirrors was characterized over the full range of spatial frequencies both before and after multilayer coating. EUV scattering from the individual mirrors was measured and compared with the surface profilometry. A knife-edge test was used to directly measure the flare of the assembled cameras. The flare measured in this way is in excellent agreement with the contrast of isolated printed lines and with the point spread function of the camera as determined by EUV interferometry. The measured flare of the camera is also in good agreement with the flare calculated from the combined surface profile measurements of the individual mirrors. Consistent with the improvements made in the surface finish of the mirror substrates, a significant reduction in the flare is observed as compared with previously existing cameras.

© (1999) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Eric M. Gullikson ; Sherry L. Baker ; John E. Bjorkholm ; Jeffrey Bokor ; Kenneth A. Goldberg, et al.
"EUV scattering and flare of 10X projection cameras", Proc. SPIE 3676, Emerging Lithographic Technologies III, 717 (June 25, 1999); doi:10.1117/12.351162; http://dx.doi.org/10.1117/12.351162


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