'On-chip' color filters are commonly used to convert monochromatic, solid-state image sensor into color sensors because they offer a good compromise between cost and resolution for digital cameras. The color filters are fabricated directly onto the surface of the CMOS or CCD image sensors, which generates a mosaic array of pixel-size filter elements. Diazonaphthoquinone-novolak photoresist is used to produce these filters by successively depositing and patterning each color layer. The choice of colors can vary from additive to subtractive or combinations of both.© (1999) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.