Application of blazed gratings for determination of equivalent primary azimuthal aberrations

Joseph P. Kirk; Christopher J. Progler

doi:10.1117/12.354375

26 July 1999 Application of blazed gratings for determination of equivalent primary azimuthal aberrations

Joseph P. Kirk, Christopher J. Progler

Proceedings Volume 3679, Optical Microlithography XII; (1999) https://doi.org/10.1117/12.354375
Event: Microlithography '99, 1999, Santa Clara, CA, United States

Abstract

Aberrations are determined from wafers exposed using a test reticle having blazed gratings with orientations from 0 to 337.5 degrees in increments of 22.5 degrees. The image of the phase grating is micro stepped thorough focus on the surface of high absorption photoresist. A second blanket exposure is applied to the latent images to make the developed resist images have a surface relief linearly related to the aerial image intensity. The first order diffraction efficiency of this surface grating is directly propagational to the first harmonic of the surface relief. This diffraction efficiency is recorded as a digitized dark- field image and processed to evalute the aberrations. These images are simulated and matched to those recorded in the photoresist by adjusting the aberrations to achieve a best match. The primary azimuthal aberration contributions are separated by Fourier analysis into coma, astigmatism, 3 leaf clover, etc. and laser used to indicate lens quality. Several grating frequencies are required to separate higher order components of each azimuthal aberration. Only one grating frequency is used in the data reported here and all orders of each azimuthal aberration are lumped into equivalent primary azimuthal aberrations.

Citation Download Citation

Joseph P. Kirk and Christopher J. Progler "Application of blazed gratings for determination of equivalent primary azimuthal aberrations", Proc. SPIE 3679, Optical Microlithography XII, (26 July 1999); https://doi.org/10.1117/12.354375

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available