Preparation and characterization of sol-gel-derived PZT thin films for microactuators

Zhanjie Wang; Ryutaro Maeda; Kaoru M. Kikuchi

doi:10.1117/12.341162

10 March 1999 Preparation and characterization of sol-gel-derived PZT thin films for microactuators

Zhanjie Wang, Ryutaro Maeda, Kaoru M. Kikuchi

Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341162
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France

Abstract

Crack-free ferroelectric thin films of lead zirconate titanate with thickness of 3 micrometers for microactuators were fabricated using Sol-Gel spin-coating onto Pt/Ti/SiO₂/Si substrates. The precursor solution was prepared from lead acetate, zirconium-n-propoxide and titanium tetraisopropoxide. 2-propanol was used as the solvent. The crystalline phase as well as preferred orientation in the PZT films were investigated using x-ray diffraction analysis. The microstructure and composition of the films were studied by scanning electron microscopy (SEM) and energy dispersive x-ray spectroscopy, respectively. The well-crystallized perovskite phase and the preferred orientations in the direction of the (100) plane were obtained using the heat treatment for dry at 120 degrees C, for pyrolysis at 300 degrees C and for crystallization at 600 degrees C. The prepared films showed nanometer grains with smooth and uniform surface. The dielectric constants and loss values of these films measured at 1 kHz were approximately 1250 and 0.04, respectively, while the remnant polarization and the coercive field were 45.5 (mu) C/cm² and 58.5 kV/cm. Our results suggest that fabrication of good structural quality PZT films of a few micrometers thick for use in micro actuators is possible.

Citation Download Citation

Zhanjie Wang, Ryutaro Maeda, and Kaoru M. Kikuchi "Preparation and characterization of sol-gel-derived PZT thin films for microactuators", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341162

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available