Full Content is available to subscribers

Subscribe/Learn More  >
Proceedings Article

Preparation and characterization of sol-gel-derived PZT thin films for microactuators

[+] Author Affiliations
Zhanjie Wang, Ryutaro Maeda, Kaoru M. Kikuchi

Japan Advanced Institute of Science and Technology (Japan)

Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, 948 (March 10, 1999); doi:10.1117/12.341162
Text Size: A A A
From Conference Volume 3680

  • Design, Test, and Microfabrication of MEMS and MOEMS
  • Bernard Courtois; Selden B. Crary; Wolfgang Ehrfeld; Hiroyuki Fujita; Jean Michel Karam; Karen W. Markus
  • Paris, France | March 30, 1999

abstract

Crack-free ferroelectric thin films of lead zirconate titanate with thickness of 3 micrometers for microactuators were fabricated using Sol-Gel spin-coating onto Pt/Ti/SiO2/Si substrates. The precursor solution was prepared from lead acetate, zirconium-n-propoxide and titanium tetraisopropoxide. 2-propanol was used as the solvent. The crystalline phase as well as preferred orientation in the PZT films were investigated using x-ray diffraction analysis. The microstructure and composition of the films were studied by scanning electron microscopy (SEM) and energy dispersive x-ray spectroscopy, respectively. The well-crystallized perovskite phase and the preferred orientations in the direction of the (100) plane were obtained using the heat treatment for dry at 120 degrees C, for pyrolysis at 300 degrees C and for crystallization at 600 degrees C. The prepared films showed nanometer grains with smooth and uniform surface. The dielectric constants and loss values of these films measured at 1 kHz were approximately 1250 and 0.04, respectively, while the remnant polarization and the coercive field were 45.5 (mu) C/cm2 and 58.5 kV/cm. Our results suggest that fabrication of good structural quality PZT films of a few micrometers thick for use in micro actuators is possible.

© (1999) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Zhanjie Wang ; Ryutaro Maeda and Kaoru M. Kikuchi
"Preparation and characterization of sol-gel-derived PZT thin films for microactuators", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, 948 (March 10, 1999); doi:10.1117/12.341162; http://dx.doi.org/10.1117/12.341162


Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).

Figures

Tables

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement

  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.