Scanning probe metrology

David A. Grigg; Joseph E. Griffith; G. P. Kochanski; Michael J. Vasile; Phillip E. Russell

doi:10.1117/12.59814

1 June 1992 Scanning probe metrology

David A. Grigg, Joseph E. Griffith, G. P. Kochanski, Michael J. Vasile, Phillip E. Russell

Proceedings Volume 1673, Integrated Circuit Metrology, Inspection, and Process Control VI; (1992) https://doi.org/10.1117/12.59814
Event: Microlithography '92, 1992, San Jose, CA, United States

Abstract

The design of a scanning probe microscope suitable for metrology applications must include solutions to several problems. Actuator errors can be large because of their nonlinear behavior, but this can be solved by independently monitoring the actuator's motion. The probe must be shaped properly for a given measurement, and it must be characterized to allow interpretation of the measurement. We have studied the effects of interaction forces and probe shape with emphasis on surface roughness measurements.

Citation Download Citation

David A. Grigg, Joseph E. Griffith, G. P. Kochanski, Michael J. Vasile, and Phillip E. Russell "Scanning probe metrology", Proc. SPIE 1673, Integrated Circuit Metrology, Inspection, and Process Control VI, (1 June 1992); https://doi.org/10.1117/12.59814

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