Fabrication and imaging of quantum-well wire structures

Lars Samuelson; Kristina Georgsson; Anders Gustafsson; Ivan Maximov; Lars Montelius; Stefan Nilsson; Werner Seifert; Allen Semu

doi:10.1117/12.137655

2 September 1992 Fabrication and imaging of quantum-well wire structures

Lars Samuelson, Kristina Georgsson, Anders Gustafsson, Ivan Maximov, Lars Montelius, Stefan Nilsson, Werner Seifert, Allen Semu

Author Affiliations +

Proceedings Volume 1676, Advanced Semiconductor Epitaxial Growth Processes and Lateral and Vertical Fabrication; (1992) https://doi.org/10.1117/12.137655
Event: Semiconductors '92, 1992, Somerset, NJ, United States

Abstract

Quantum well wire structures in metalorganic vapor phase epitaxy (MOVPE) grown Ga_.53In_.47As/InP and in Ga_.85In_.15As/GaAs have been fabricated by electron beam lithography and subsequent metalorganic reactive ion etching (MORIE) and/or wet etching. The dry etching was optimized for low-damage conditions and for mask-to-wafer pattern transfer. In the wet etching process, an underetching was implemented in order to reduce the linewidth defined by the etching mask. A wet etching step has been used after the dry etching for removal of the partly damaged surface region and for smoothing of the sidewalls of the wires. Differently processed areas were excited selectively by low- temperature cathodoluminescence (CL) from which the optical quality of the wire material was evaluated and blue shifts for the wires as large as 10 meV were observed. Individual wires have also been imaged and effects of one-dimensional exciton diffusion have been probed.

Citation Download Citation

Lars Samuelson, Kristina Georgsson, Anders Gustafsson, Ivan Maximov, Lars Montelius, Stefan Nilsson, Werner Seifert, and Allen Semu "Fabrication and imaging of quantum-well wire structures", Proc. SPIE 1676, Advanced Semiconductor Epitaxial Growth Processes and Lateral and Vertical Fabrication, (2 September 1992); https://doi.org/10.1117/12.137655

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available