Optical properties of mixed TiO2-SiO2 films, from infrared to ultraviolet

A. Brunet-Bruneau; S. Fisson; Bruno Gallas; G. Vuye; Josette Rivory

doi:10.1117/12.360080

7 September 1999 Optical properties of mixed TiO₂-SiO₂ films, from infrared to ultraviolet

A. Brunet-Bruneau, S. Fisson, Bruno Gallas, G. Vuye, Josette Rivory

Proceedings Volume 3738, Advances in Optical Interference Coatings; (1999) https://doi.org/10.1117/12.360080
Event: Optical Systems Design and Production, 1999, Berlin, Germany

Abstract

Mixed oxides are useful for obtaining the intermediate refractive indices needed in the realization of graded-index thin films. Co-evaporated TiO₂-SiO₂ mixtures are studied for a large range of concentrations via UV-VIS, IR ellipsometry and XPS. An understanding of the nature of these mixtures and their air exposure stability is important for further applications. At low TiO₂ concentrations, Ti⁴⁺ ions are inserted into the silica tetrahedral network, as shown by the IR peak at 945 cm^-1. At higher concentrations, an evolution from TiO₄ tetrahedra to TiO₆ octahedra is presumed. The behavior of the O_1s core level peak indicates that a least two phases coexist. Comparison between concentration determined using XPS and RBS shows a deficit in TiO₂ at the surface of the films, especially at high TiO₂ concentrations. The evolution of the mixtures optical constants will be presented in a large wavelength range, going from IR to UV. Particular attention will be paid to the variations with respect to the frequency of the vibration modes in the IR range, to the refractive index in the transparency region, and to the extinction coefficient at he absorption threshold. In addition, AFM measurements show the variation of the grain size as a function of the TiO₂ concentration.

Citation Download Citation

A. Brunet-Bruneau, S. Fisson, Bruno Gallas, G. Vuye, and Josette Rivory "Optical properties of mixed TiO₂-SiO₂ films, from infrared to ultraviolet", Proc. SPIE 3738, Advances in Optical Interference Coatings, (7 September 1999); https://doi.org/10.1117/12.360080

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