Electron-beam lithography fabrication of phase holograms to generate Laguerre-Gaussian beams

Yoko Miyamoto; Mitsutoshi Masuda; Atsushi Wada; Mitsuo Takeda

doi:10.1117/12.347806

7 May 1999 Electron-beam lithography fabrication of phase holograms to generate Laguerre-Gaussian beams

Yoko Miyamoto, Mitsutoshi Masuda, Atsushi Wada, Mitsuo Takeda

Proceedings Volume 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99); (1999) https://doi.org/10.1117/12.347806
Event: Optical Engineering for Sensing and Nanotechnology (ICOSN '99), 1999, Yokohama, Japan

Abstract

The Laguerre-Gaussian beam is an optical beam with a phase singularity that propagates along its axis. We have fabricated blazed phase holograms to generate these beams using electron- beam lithography techniques. The resulting holograms were illuminated with a Gaussian beam, and the phase distribution of the resulting beams were examined by analyzing interference fringes with the Fourier-transform method.

Citation Download Citation

Yoko Miyamoto, Mitsutoshi Masuda, Atsushi Wada, and Mitsuo Takeda "Electron-beam lithography fabrication of phase holograms to generate Laguerre-Gaussian beams", Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); https://doi.org/10.1117/12.347806

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