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Proceedings Article

Real-time shape measurement by integrated phase-shifting method

[+] Author Affiliations
Yoshiharu Morimoto, Motoharu Fujigaki, Hiroki Toda

Wakayama Univ. (Japan)

Proc. SPIE 3744, Interferometry '99: Techniques and Technologies, 118 (August 13, 1999); doi:10.1117/12.357702
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From Conference Volume 3744

  • Interferometry '99: Techniques and Technologies
  • Malgorzata Kujawinska; Mitsuo Takeda
  • Pultusk Castle, Poland | October 20, 1999

abstract

Phase distribution analysis of deformed gratings in moire method and grating projection method provides accurate shape of specimen. We previously proposed the phase-shifting method using correlation with a rectangular function. The phase analysis uses many images during phase shifting of the projected grating. In this paper, we propose a new real-time phase analysis method, that is, the integrated phase- shifting method using four images of phase-shifted grating patterns with a rectangular brightness distribution. The theory and some applications to shape measurement are shown.

© (1999) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Yoshiharu Morimoto ; Motoharu Fujigaki and Hiroki Toda
"Real-time shape measurement by integrated phase-shifting method", Proc. SPIE 3744, Interferometry '99: Techniques and Technologies, 118 (August 13, 1999); doi:10.1117/12.357702; http://dx.doi.org/10.1117/12.357702


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