Progress in ion figuring large optics

Lynn N. Allen

doi:10.1117/12.213776

14 July 1995 Progress in ion figuring large optics

Lynn N. Allen

Proceedings Volume 2428, Laser-Induced Damage in Optical Materials: 1994; (1995) https://doi.org/10.1117/12.213776
Event: Laser-Induced Damage in Optical Materials: 1994, 1994, Boulder, CO, United States

Abstract

Ion figuring is an optical fabrication method that provides deterministic surface figure error correction of previously polished surfaces by using a directed, inert, and neutralized ion beam to physically sputter material from the optic surface. Considerable process development has been completed and numerous large optical elements have been successfully final-figured using this process. The process has been demonstrated to be highly deterministic, capable of completing complex-shaped optical element configurations in only a few process iterations, and capable of achieving high- quality surface figure accuracies. A review of the neutral ion beam figuring process will be provided, along with discussion of processing results for several large optics. Most notably, processing of Keck 10 meter telescope primary mirror segments and correction of one other large optic where a convergence ratio greater than 50 was demostrated during the past year will be discussed. Also, the process has been demonstrated on various optical materials, including fused silica, ULE, zerodur, silicon, and chemically vapor deposited (CVD) silicon carbide. Where available, results of surface finish changes caused by the ion bombardment process will be discussed. Most data have shown only limited degradation of the optic surface finish, and that it is generally a function of the quality of mechanical polishing prior to ion figuring. Removals of from 5 to 10 micrometers on some materials are acceptable without adversely altering the surface finish specularity.

Citation Download Citation

Lynn N. Allen "Progress in ion figuring large optics", Proc. SPIE 2428, Laser-Induced Damage in Optical Materials: 1994, (14 July 1995); https://doi.org/10.1117/12.213776

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available