Surface roughness and waviness measurements for optical parts (Invited Paper)

Thomas C. Bristow

doi:10.1117/12.132118

20 October 1992 Surface roughness and waviness measurements for optical parts (Invited Paper)

Thomas C. Bristow

Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132118
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan

Abstract

This article describes surface roughness and waviness measurements for optical parts. The basic description of roughness is reviewed for a digital surface profiler and comparisons made for the lower spectrum description of surface topography. The power spectrum analysis is also reviewed with a special emphasis on a low variance algorithm. Applications for the optics industry for both flat and curved parts are presented.

Citation Download Citation

Thomas C. Bristow "Surface roughness and waviness measurements for optical parts (Invited Paper)", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); https://doi.org/10.1117/12.132118

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