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Proceedings Article

Design, fabrication, and polarization of soft x-ray transmission multilayers

[+] Author Affiliations
Hiroshi Nomura, Kou Mayama, Takuya Sasaki, Masaki Yamamoto, Mihiro Yanagihara

Tohoku Univ. (Japan)

Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, 395 (October 20, 1992); doi:10.1117/12.132147
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From Conference Volume 1720

  • Intl Symp on Optical Fabrication, Testing, and Surface Evaluation
  • Jumpei Tsujiuchi
  • Tokyo, Japan | June 10, 1992

abstract

Soft-x-ray transmission multilayers have been designed and fabricated for use as polarizing elements. Polarization performance of the multilayers has been studied at a photon energy of 97 eV by rotating analyzer ellipsometry with a multilayer reflection polarizer. The transmission multilayers were found to be a good polarizer of 99.2% polarizance and a phase shifter of 90 degree(s) retardation with equal transmission ratio (5:3) and high throughput around 10%.

© (1992) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Hiroshi Nomura ; Kou Mayama ; Takuya Sasaki ; Masaki Yamamoto and Mihiro Yanagihara
"Design, fabrication, and polarization of soft x-ray transmission multilayers", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, 395 (October 20, 1992); doi:10.1117/12.132147; http://dx.doi.org/10.1117/12.132147


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