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Proceedings Article

Fabrication of Wolter I multilayer coated optics via electroforming: an update

[+] Author Affiliations
Melville P. Ulmer, Robert I. Altkorn, Anita Madan, Michael E. Graham, Yip-Wah Chung

Northwestern Univ. (USA)

Allen S. Krieger

Radiation Science Inc. (USA)

Chian Liu, Barry P. Lai, Derrick C. Mancini

Argonne National Lab. (USA)

Peter Z. Takacs

Brookhaven National Lab. (USA)

Proc. SPIE 3773, X-Ray Optics Design, Performance, and Applications, 113 (November 16, 1999); doi:10.1117/12.370081
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From Conference Volume 3773

  • X-Ray Optics Design, Performance, and Applications
  • Ali M. Khounsary; Andreas K. Freund; Tetsuya Ishikawa; George Srajer; Jonathan C. Lang
  • Denver, CO, USA | July 18, 1999

abstract

Previously we reported the ability to lift off, via electroforming, multilayers deposited on gold coated flat mandrels. We had shown the multilayers remained intact after separation as the X-ray reflectivity produced peaks in the reflectivity versus energy measurements. Since gold is high a Z material and is not easy to remove via chemical etching, we have now developed the ability to use a low-Z material that is also etchable. Moreover, we improved the quality of the smoothing with the process of amorphous carbon nitride (CNx) deposition on electroless nickel in both our test chamber and our much larger fabrication chamber. Our method of mandrel preparation is to first deposit CNx on electroless nickel, then a low-Z release layer, and then the multilayers. We have demonstrated that flat mandrels produced in this manner can be cooled to liquid nitrogen temperatures without harm. This is important as the usual practice is to shrink mandrels that have Wolter I shape via liquid nitrogen. We have coated a truncated-cone-shaped 'engineering' (not high quality in terms of smoothness) mandrel and have removed the layers, intact, on the inside of an electroform with a cylindrical, truncated- cone geometry. We report the details of the fabrication, engineering, and X-ray tests.

© (1999) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Melville P. Ulmer ; Robert I. Altkorn ; Anita Madan ; Michael E. Graham ; Yip-Wah Chung, et al.
"Fabrication of Wolter I multilayer coated optics via electroforming: an update", Proc. SPIE 3773, X-Ray Optics Design, Performance, and Applications, 113 (November 16, 1999); doi:10.1117/12.370081; http://dx.doi.org/10.1117/12.370081


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