Microhybrid integrated devices and components: microphotonic devices

Koichi Imanaka

doi:10.1117/12.138899

13 January 1993 Microhybrid integrated devices and components: microphotonic devices

Koichi Imanaka

Proceedings Volume 1751, Miniature and Micro-Optics: Fabrication and System Applications II; (1993) https://doi.org/10.1117/12.138899
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

Miniaturized opto-electronic and opto-electro-micromechanic hybrid integrated components are developed utilizing newly developed micro active semiconductor devices (e.g., laser diode, pin-point emission LED), micro optic passive devices (e.g., micro Fresnel lens, grating devices), and micro actuators. As a typical example, high-performance collimated and focused light sources, optical sensing devices, and two dimensional optical scanner are presented in detail.

Citation Download Citation

Koichi Imanaka "Microhybrid integrated devices and components: microphotonic devices", Proc. SPIE 1751, Miniature and Micro-Optics: Fabrication and System Applications II, (13 January 1993); https://doi.org/10.1117/12.138899

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