Precision calibration and systematic error reduction in the long trace profiler

Shinan Qian; Giovanni Sostero; Peter Z. Takacs

doi:10.1117/12.369239

11 November 1999 Precision calibration and systematic error reduction in the long trace profiler

Shinan Qian, Giovanni Sostero, Peter Z. Takacs

Proceedings Volume 3782, Optical Manufacturing and Testing III; (1999) https://doi.org/10.1117/12.369239
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

The Long Trace Profiler has become the instrument of choice for mirror surface figure test and slope error measurement of synchrotron radiation and x-ray astronomy optics. In order to achieve highly accurate measurements with the LTP, systematic errors need to be reduced by precise angle calibration and accurate focal plane position adjustment. A self-scanning method is presented to adjust the focal plane position of the detector with high precision by use of a pentaprism scanning technique. The focal plane position can be set to better than 0.25 mm for a 1250 mm focal length FT lens using this technique. The use of a 0.03 arc second resolution theodolite coupled with the sensitivity of the LTP detector system can be used to calibrate angular linearity error very precisely. Some suggestions are introduced for reducing the system error. With these precision calibration techniques, accuracy in the measurement of figure and slope error on meter-long mirrors is now at a level of about 1 (mu) rad rms within whole testing range of the LTP.

Citation Download Citation

Shinan Qian, Giovanni Sostero, and Peter Z. Takacs "Precision calibration and systematic error reduction in the long trace profiler", Proc. SPIE 3782, Optical Manufacturing and Testing III, (11 November 1999); https://doi.org/10.1117/12.369239

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available