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Proceedings Article

Multidetector hemispherical polarized optical scattering instrument

[+] Author Affiliations
Thomas A. Germer

National Institute of Standards and Technology (USA)

Proc. SPIE 3784, Rough Surface Scattering and Contamination, 304 (October 25, 1999); doi:10.1117/12.366713
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From Conference Volume 3784

  • Rough Surface Scattering and Contamination
  • Philip T. C. Chen; Zu-Han Gu; Alexei A. Maradudin
  • Denver, CO, USA | July 18, 1999

abstract

A multidetector optical scattering instrument is described and characterized. The instrument has twenty-eight detectors surrounding and substantially covering the scattering hemisphere. Each detector contains a polarizer so that each is only sensitive to p-polarized scattered light. The polarization of the incident light is linear and can be rotated into any angle. With this instrument, polarized light scattering measurements can be performed in multiple directions at once. The utility of this instrument is demonstrated by measuring the light scattered from a microrough silicon sample and silicon surfaces containing different sizes of polystyrene latex spheres. The results are compared to the predictions of theoretical calculations. It is shown that the distribution of polarization parameters for each of the different sizes of spheres and for microroughness are different. It is expected that designs similar to the one presented here will allow for improved on-line characterization of defects on smooth surfaces.

© (1999) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Thomas A. Germer
"Multidetector hemispherical polarized optical scattering instrument", Proc. SPIE 3784, Rough Surface Scattering and Contamination, 304 (October 25, 1999); doi:10.1117/12.366713; http://dx.doi.org/10.1117/12.366713


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