Determination of optical constant of diamond thin films

Xuantong Ying; Yuanhua Shen; Hang Xue; Jianhai Liu; Zhongjing Xing; Jianzhong Xu; Fengshan Zhang

doi:10.1117/12.130775

20 November 1992 Determination of optical constant of diamond thin films

Xuantong Ying, Yuanhua Shen, Hang Xue, Jianhai Liu, Zhongjing Xing, Jianzhong Xu, Fengshan Zhang

Proceedings Volume 1759, Diamond Optics V; (1992) https://doi.org/10.1117/12.130775
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

Refractive index N, extinction coefficient k, and surface roughness (alpha) of synthetic diamond thin films are strongly dependent on the growth process. The current presentation describes a multiparameter optical transmittance curve fitting method to determine refractive index n, extinction coefficient k, thickness t, and surface roughness (alpha) of synthetic CVD diamond thin films taking account optical scattering of the light by the coating surface. All the data in this method, instead of extreme values in the conventional enveloped method, of IR transmittance curve are used to fit the above properties of diamond films in a short time by specially developed computer software. The accuracy of determination can be improved.

Citation Download Citation

Xuantong Ying, Yuanhua Shen, Hang Xue, Jianhai Liu, Zhongjing Xing, Jianzhong Xu, and Fengshan Zhang "Determination of optical constant of diamond thin films", Proc. SPIE 1759, Diamond Optics V, (20 November 1992); https://doi.org/10.1117/12.130775

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