Uncooled thermal imaging with monolithic silicon focal planes

R. Andrew Wood

doi:10.1117/12.160553

1 November 1993 Uncooled thermal imaging with monolithic silicon focal planes

R. Andrew Wood

Proceedings Volume 2020, Infrared Technology XIX; (1993) https://doi.org/10.1117/12.160553
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

This article summarizes the characteristics of Honeywell's two-dimensional (2-D) arrays of micromachined microbolometers, discusses practical methods of operating these arrays in high-sensitivity room-temperature infrared (IR) imaging systems, and describes recent performance measurements.

Citation Download Citation

R. Andrew Wood "Uncooled thermal imaging with monolithic silicon focal planes", Proc. SPIE 2020, Infrared Technology XIX, (1 November 1993); https://doi.org/10.1117/12.160553

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