Multiple beam ptychography for large field of view imaging

Charles Bevis; Robert Karl Jr.; Jonathan Reichanadter; Dennis F. Gardner; Christina Porter; Elisabeth Shanblatt; Michael Tanksalvala; Giulia F. Mancini; Margaret Murnane; Henry Kapteyn; Daniel Adams

doi:10.1117/12.2236242

30 September 2016 Multiple beam ptychography for large field of view imaging

Charles Bevis, Robert Karl Jr., Jonathan Reichanadter, Dennis F. Gardner, Christina Porter, Elisabeth Shanblatt, Michael Tanksalvala, Giulia F. Mancini, Margaret Murnane, Henry Kapteyn, Daniel Adams

Author Affiliations +

Proceedings Volume 9948, Novel Optical Systems Design and Optimization XIX; 99480U (2016) https://doi.org/10.1117/12.2236242
Event: SPIE Optical Engineering + Applications, 2016, San Diego, California, United States

Abstract

We present an extension of ptychography coherent diffractive imaging that enables simultaneous imaging of several areas of an extended sample using multiple, spatially separated interfering beams. We show that this technique will increase the throughput of an imaging system by a factor that is equal to the number of beams used. This allows for the acquisition of large field of view images with near diffraction-limited resolution without an increase in data acquisition. This represents a significant step towards large field of view, high resolution imaging in the EUV and x-ray energy regimes.

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Charles Bevis, Robert Karl Jr., Jonathan Reichanadter, Dennis F. Gardner, Christina Porter, Elisabeth Shanblatt, Michael Tanksalvala, Giulia F. Mancini, Margaret Murnane, Henry Kapteyn, and Daniel Adams "Multiple beam ptychography for large field of view imaging", Proc. SPIE 9948, Novel Optical Systems Design and Optimization XIX, 99480U (30 September 2016); https://doi.org/10.1117/12.2236242

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