Paper
22 May 2009 Methodologies for the preparation of soft materials using cryoFIB SEM
Debbie J. Stokes, Mike F. Hayles
Author Affiliations +
Proceedings Volume 7378, Scanning Microscopy 2009; 73780G (2009) https://doi.org/10.1117/12.821834
Event: SPIE Scanning Microscopy, 2009, Monterey, California, United States
Abstract
The recent advent of focused ion beam (FIB) technology in combination with the more familiar scanning electron microscope (SEM) is bringing new insights to the characterization of a range of bulk materials. Furthermore, the FIB SEM can be augmented by a cryo-preparation/transfer system, enabling both frozen and frozen-hydrated soft materials to be FIB-milled at low temperature. This provides an opportunity to perform in situ site-specific crosssectioning, and hence study the interior of a bulk material in two and three dimensions, and serves as an alternative to the freeze-fracturing techniques associated with conventional cryo-SEM. For soft materials in particular, the quality of FIB SEM results is dependent on correct preparation of the specimen's top surface, which is rather challenging for specimens at low temperature. We therefore demonstrate methods for 'cold deposition' of a protective, planarising surface layer on a cryo-prepared sample, enabling high-quality cross-sectioning and investigation of structures at the nano-scale.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Debbie J. Stokes and Mike F. Hayles "Methodologies for the preparation of soft materials using cryoFIB SEM", Proc. SPIE 7378, Scanning Microscopy 2009, 73780G (22 May 2009); https://doi.org/10.1117/12.821834
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Cited by 8 scholarly publications and 1 patent.
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KEYWORDS
Scanning electron microscopy

Ion beams

Geographic information systems

Chemical vapor deposition

Electron beams

Ions

Liquids

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