Silicon nitride light pipes for image sensors

Turgut Tut; Peter Duane; Winnie N. Ye; Munib Wober; Kenneth B. Crozier

doi:10.1117/12.860777

18 August 2010 Silicon nitride light pipes for image sensors

Turgut Tut, Peter Duane, Winnie N. Ye, Munib Wober, Kenneth B. Crozier

Proceedings Volume 7780, Detectors and Imaging Devices: Infrared, Focal Plane, Single Photon; 77800W (2010) https://doi.org/10.1117/12.860777
Event: SPIE NanoScience + Engineering, 2010, San Diego, California, United States

Abstract

We describe a means for improving the performance of CMOS image sensors using vertical waveguides, known as light pipes. We describe experimental results on the etching of silicon nitride pillars, and the fabrication of photodiodes.

Citation Download Citation

Turgut Tut, Peter Duane, Winnie N. Ye, Munib Wober, and Kenneth B. Crozier "Silicon nitride light pipes for image sensors", Proc. SPIE 7780, Detectors and Imaging Devices: Infrared, Focal Plane, Single Photon, 77800W (18 August 2010); https://doi.org/10.1117/12.860777

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