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A. J. Pang
at Heriot-Watt Univ
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Publications (1)
Proceedings Article | 30 April 2001 Paper
Modeling and simulation of a silicon microdiaphragm piezoresistive pressure sensor using finite element analysis (FEA) tools
A. Pang, Marc Desmulliez
Proceedings Volume 4407, (2001) https://doi.org/10.1117/12.425318
KEYWORDS: Resistors, Sensors, Silicon, Finite element methods, Resistance, Protactinium, Modeling and simulation, Bridges, Manufacturing, Piezoresistive sensors
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