Alejandro Mejia
at IBM Research - Albany
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 16 April 2024 Presentation + Paper
Katherine Sieg, Christopher Bottoms, Christopher Waskiewicz, Alejandro Matos Mejia, Junwon Han, Shahid Butt, Daniel Schmidt, Stefan Schoeche, Alexander Hamer, Alex Hubbard
Proceedings Volume 12955, 129551P (2024) https://doi.org/10.1117/12.3012149
KEYWORDS: Semiconducting wafers, Interferometry, Wafer bonding, Metrology

Proceedings Article | 10 April 2024 Presentation
Proceedings Volume PC12956, PC129560E (2024) https://doi.org/10.1117/12.3012541
KEYWORDS: Optical lithography, Lithography, Coating thickness, Semiconducting wafers, Plating, Photoresist processing, Dielectrics, Coating

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