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Dr. Alexey S. Ilin
researcher at Kotelnikov IRE RAS
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Author
Publications (1)
Proceedings Article | 30 December 2016 Paper
Thin film ruthenium microstructures for transition edge sensors
A. Ilin, I. Cohn, A. Vystavkin, A. Kovalenko
Proceedings Volume 10224, 102240S (2016) https://doi.org/10.1117/12.2266275
KEYWORDS: Thin films, Ruthenium, Sensors, Lithography, Silicon, Superconductors, Titanium, Scanning electron microscopy, Sputter deposition, X-ray diffraction
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