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Amir Lev
President
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Publications (2)
Proceedings Article | 2 June 2003 Paper
Overlay excursion management through sample plan optimization and cycle time reduction
Xuemei Chen, Ming-Yeon Hung, Kelly Kuo, Steven Fu, Geoge Shanthikumar, Zhoujie Mao, Shiming Deng, Viral Hazari, Kevin Monahan, Mike Slessor, Amir Lev
Proceedings Volume 5038, (2003) https://doi.org/10.1117/12.485043
KEYWORDS: Semiconducting wafers, Overlay metrology, Metrology, Time metrology, Error analysis, Statistical analysis, Process control, Lithography, Yield improvement, Scanners
Proceedings Article | 16 July 2002 Paper
Microeconomics of advanced process window control for 50-nm gates
Kevin Monahan, Xuemei Chen, Georges Falessi, Craig Garvin, Matt Hankinson, Amir Lev, Ady Levy, Michael Slessor
Proceedings Volume 4689, (2002) https://doi.org/10.1117/12.473503
KEYWORDS: Semiconducting wafers, Process control, Manufacturing, Information operations, Critical dimension metrology, Process modeling, Metrology, Etching, Lithography, Adaptive optics
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