Andreas Greiner
Lead Principal Engineer at Infineon Technologies Dresden GmbH & Co. KG
SPIE Involvement:
Conference Program Committee | Author
Publications (10)

Proceedings Article | 26 June 2017 Paper
Ch. Taudt, T. Baselt, B. Nelsen, H. Assmann, A. Greiner, E. Koch, P. Hartmann
Proceedings Volume 10329, 1032932 (2017) https://doi.org/10.1117/12.2270318
KEYWORDS: Spectroscopy, Diffraction, Radium, Plasma, Optical testing, Metrology, Light sources, Interferometry, Signal detection, Interferometers

Proceedings Article | 20 February 2017 Presentation + Paper
Ch. Taudt, T. Baselt, B. Nelsen, H. Assmann, A. Greiner, E. Koch, P. Hartmann
Proceedings Volume 10110, 1011015 (2017) https://doi.org/10.1117/12.2252375
KEYWORDS: Interferometers, Interferometry, Semiconductors, Microelectromechanical systems, Temperature metrology, Optics manufacturing, Light sources, Spectroscopy, Silicon, Calibration

Proceedings Article | 3 May 2016 Paper
Ch. Taudt, T. Baselt, B. Nelsen, H. Aßmann, A. Greiner, E. Koch, P. Hartmann
Proceedings Volume 9890, 98900R (2016) https://doi.org/10.1117/12.2227887
KEYWORDS: Metrology, Supercontinuum sources, Interferometry, Semiconducting wafers, Thin films, Data acquisition, Interferometers, Semiconductors, Sensors, Spectroscopy, Microelectromechanical systems, Spectral calibration, Calibration, Silicon

Proceedings Article | 16 March 2016 Paper
Ch. Taudt, T. Baselt, B. Nelsen, H. Aßmann, A. Greiner, E. Koch, P. Hartmann
Proceedings Volume 9754, 97540H (2016) https://doi.org/10.1117/12.2212913
KEYWORDS: Interferometry, Interferometers, Manufacturing, Semiconducting wafers, Semiconductors, Silicon, Spectroscopy, Light sources, Calibration, Metrology

Proceedings Article | 15 March 2016 Paper
Proceedings Volume 9717, 97171P (2016) https://doi.org/10.1117/12.2212784
KEYWORDS: Wavefronts, Wavefront reconstruction, Monte Carlo methods, Error analysis, Wavefront sensors, Wavefront analysis, Reconstruction algorithms, Condition numbers, Wave propagation, Spatial resolution, Applied sciences

Showing 5 of 10 publications
Conference Committee Involvement (2)
Optical and EUV Nanolithography XXXVIII
23 February 2025 | San Jose, California, United States
Optical and EUV Nanolithography XXXVII
26 February 2024 | San Jose, California, United States
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top