Antonio Luque
at Univ de Sevilla
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 1 July 2005 Paper
Antonio Luque, Jose Quero, Alfonso Ganan-Calvo, Jaume Esteve, Silvia Gonsalve
Proceedings Volume 5836, (2005) https://doi.org/10.1117/12.608639
KEYWORDS: Silicon, Semiconducting wafers, Liquids, Microfluidics, Oxides, Particles, Microsystems, Prototyping, Etching, Wafer bonding

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