Dr. Austin W. Steinforth Profile

Dr. Austin W. Steinforth

at Xcimer Energy Inc

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Author

Publications (2)

Proceedings Article | 5 March 2021 Presentation

Fabrication of optical components and micro- and nanofluidic devices in polymers by 172 nm direct photoablation

Andrey Mironov, Jinhong Kim, Austin Steinforth, Sehyun Park, Dane Sievers, Sung-Jin Park, James Eden

Proceedings Volume 11696, 116960K (2021) https://doi.org/10.1117/12.2583254

KEYWORDS: Polymers, Optical components, Vacuum ultraviolet, Polymethylmethacrylate, Photosensitive materials, Lamps, Excimers, Excimer lasers, Clean room processes

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Proceedings Article | 10 March 2020 Presentation

172 nm patterning of optical components on polymers (Conference Presentation)

Andrey Mironov, Dane Sievers, Austin Steinforth, Jinhong Kim, Sung-Jin Park, James Eden

Proceedings Volume 11292, 112920T (2020) https://doi.org/10.1117/12.2546426

KEYWORDS: Polymers, Optical components, Optical lithography, Lamps, Vacuum ultraviolet, Excimer lasers, Cornea, Optical microcavities, Plasmas, Molecules

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