CONFERENCE PROCEEDINGS
Advanced Search
Roberto Bellotti
at Istituto Nazionale di Ricerca Metrologica
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 27 August 2014 Paper
Recent advances of the metrological AFM at INRIM
R. Bellotti, G. Picotto
Proceedings Volume 9173, 917304 (2014) https://doi.org/10.1117/12.2061954
KEYWORDS: Interferometers, Metrology, Atomic force microscopy, Error analysis, Sensors, Mirrors, Head, Heterodyning, Signal detection, Calibration
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top