Mr. Mohamed Ben Khalifa Profile

Mohamed Ben Khalifa

at Ecole Centrale de Lyon

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Proceedings Article | 8 July 2003 Paper

Low-temperature sputter deposition of indium tin oxide anode for inverted organic diodes

David Vaufrey, Mohamed Ben Khalifa, Jacques Tardy

Proceedings Volume 5036, (2003) https://doi.org/10.1117/12.498455

KEYWORDS: Diodes, Oxygen, Organic light emitting diodes, Sputter deposition, Tin, Plasma, Silicon, Indium, Oxides, Atomic force microscopy

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This paper reports on Organic Light Emitting Diodes (OLED) the structure of which has been inverted in order to have a light emission through the top electrode instead of through the substrate. This technology is of prime importance for high resolution active matrix displays and microdisplays as well. The key point of such a procedure is the deposition of the Indium Tin Oxide (ITO) transparent top anode. This was carried out onto the organic films structure by RF sputtering under soft enough conditions so as to avoid as much as possible any deterioration of the underlying organic layers (room temperature deposition, low plasma power density and minimal bombardment effect). The electrical and optical properties of ITO as a function of the deposition conditions are first described. Hall effect measurements show that ITO films can be grown at room temperature with a high mobility (40 cm²/V.s) and a carrier density exceeding 5 10²⁰ cm^-3. The surface roughness as a function of the plasma conditions was determined by the AFM and can be as low as 12 Angstrom. The non invasiveness of the proposed ITO deposition conditions on organic layers was assessed by measuring the photoluminescence (PL) degradation of (8-(hydroquinoline) Aluminum (Alq₃). It was shown that under optimized deposition conditions, no appreciable PL degradation of the organic layers was observed. At last hole only Silicon/Al/Poly(N-vinylcarbazole)(PVK)/Poly(3,4)ethylenedioxythiophene / Polystyrenesulphonate (PEDT/PSS). ITO diodes and Silicon/Al/Alq₃/NPB/CuPc/ITO diodes were processed, characterized and compared to standard “through the substrate” emitting diodes.

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