Dr. Charles D. Schaper
President/CEO at Transfer Devices Inc
SPIE Involvement:
Author
Publications (11)

Proceedings Article | 3 April 2010 Paper
Proceedings Volume 7637, 76370U (2010) https://doi.org/10.1117/12.848402
KEYWORDS: Lithography, Semiconducting wafers, Coating, Optical lithography, Silicon, Photoresist processing, Nanostructures, Manufacturing, Optical alignment, Polymers

Proceedings Article | 20 May 2004 Paper
Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.534928
KEYWORDS: Polymers, Adhesives, Thin films, Photomasks, Printing, Silicon, Solids, Particles, Polymer thin films, Lithography

SPIE Journal Paper | 1 January 2004
JM3, Vol. 3, Issue 01, (January 2004) https://doi.org/10.1117/12.10.1117/1.1630805
KEYWORDS: Polymers, Adhesives, Lithography, Liquids, Printing, Solids, Semiconducting wafers, Optical alignment, Polymer thin films, Silicon

Proceedings Article | 16 June 2003 Paper
Proceedings Volume 5037, (2003) https://doi.org/10.1117/12.484420
KEYWORDS: Semiconducting wafers, Printing, Lithography, Polymers, Liquids, Adhesives, Silicon, Etching, Solids, Optical alignment

Proceedings Article | 23 August 2000 Paper
Lay Lay Lee-Aquila, Charles Schaper, Weng Khuen Ho
Proceedings Volume 4182, (2000) https://doi.org/10.1117/12.410103
KEYWORDS: Photoresist processing, Process control, Reflectivity, Process modeling, Semiconducting wafers, Error analysis, Lithography, Sensors, Coating, Critical dimension metrology

Showing 5 of 11 publications
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