Mr. Daniel Keogan Profile

Daniel Keogan

Vice President at FF Transforms LLC

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Publications (6)

Proceedings Article | 28 May 2003 Paper

Compensation of long-range process effects on photomasks by design data correction

Martin Bloecker, Gerd Ballhorn, Jens Schneider, Nikola Belic, Hans Eisenmann, Danny Keogan

Proceedings Volume 5148, (2003) https://doi.org/10.1117/12.515122

KEYWORDS: Critical dimension metrology, Etching, Photomasks, Data corrections, Data modeling, Dry etching, Convolution, Chromium, Plasma etching, Chlorine

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Proceedings Article | 27 December 2002 Paper

Integrating CD and lithographic process window analysis with mask data preparation for subwavelength ICs

Devendra Joshi, Danny Keogan, James Falbo

Proceedings Volume 4889, (2002) https://doi.org/10.1117/12.467847

KEYWORDS: Photomasks, Lithography, Semiconducting wafers, Process modeling, Optical proximity correction, Manufacturing, Computed tomography, Inspection, Silicon, Optics manufacturing

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Proceedings Article | 27 December 2002 Paper

Advanced and highly reliably distributed computing in a fully automated environment

Gerd Ballhorn, Martin Bloecker, Danny Keogan, Peter Moberts

Proceedings Volume 4889, (2002) https://doi.org/10.1117/12.467917

KEYWORDS: Computed tomography, Sun, Vestigial sideband modulation, Control systems, Explosives, Data processing, Computer aided design, Beam shaping, Data conversion, Distributed computing

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Proceedings Article | 27 December 2002 Paper

Compensation of long-range process effects on photomasks by design data correction

Jens Schneider, Martin Bloecker, Gerd Ballhorn, Nikola Belic, Hans Eisenmann, Danny Keogan

Proceedings Volume 4889, (2002) https://doi.org/10.1117/12.467572

KEYWORDS: Critical dimension metrology, Etching, Data corrections, Photomasks, Dry etching, Data modeling, Convolution, Plasma etching, Chromium, Computed tomography

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Proceedings Article | 27 December 2002 Paper

Further developments in distributed hierarchical processing

Paul DePesa, Danny Keogan

Proceedings Volume 4889, (2002) https://doi.org/10.1117/12.469151

KEYWORDS: Computed tomography, Optical proximity correction, Operating systems, Databases, Data processing, Sun, Photomasks, Beam shaping, Analytical research, Beam analyzers

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Showing 5 of 6 publications

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