Dr. Du Hyun Beak Profile

Dr. Du Hyun Beak

at SAMSUNG Electronics Co Ltd

SPIE Involvement:

Author

Publications (6)

Proceedings Article | 24 March 2017 Presentation + Paper

Scanner-to-scanner CD analysis and control in an HVM environment

Du Hyun Beak, Ju Hee Shin, Tony Park, Dong Kyeng Han, Jin Phil Choi, Jeong Heung Kong, Young Seog Kang, Se Yeon Jang, Peter Nikolsky, Chris Strolenberg, Noh-Kyoung Park, Khalid Elbattay, Vito Tomasello, Austin Peng, Anand Guntuka, Zhao-Ze Li, Ronald Goossens, Machi Ryu, Jangho Shin, Chung-Yong Kim, Andrew Moe, Yun-A Sung

Proceedings Volume 10147, 101470A (2017) https://doi.org/10.1117/12.2258339

KEYWORDS: Critical dimension metrology, Scanners, Lithographic illumination, Image processing, Process control, Computational lithography, Semiconducting wafers, Data modeling, Metrology, Photomasks, Calibration, Finite element methods, Laser scanners, 3D scanning

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Proceedings Article | 12 April 2013 Paper

Lens heating impact analysis and controls for critical device layers by computational method

Du Hyun Beak, Jin Phil Choi, Tony Park, Young Sun Nam, Young Seog Kang, Chan-Hoon Park, Ki-Yeop(Chris) Park, Chang-Hoon Ryu, Wenjin Huang, Ki-Ho Baik

Proceedings Volume 8683, 86831Q (2013) https://doi.org/10.1117/12.2012135

KEYWORDS: Photomasks, Wavefronts, Calibration, 3D modeling, Scanners, Control systems, Semiconducting wafers, Data modeling, Reticles, Diffraction

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Proceedings Article | 21 February 2008 Paper

Long-term stabilized two beam combination laser system with amplifiers using the phase controlled stimulated Brillouin scattering phase conjugate mirrors

Hong Jin Kong, Jin Woo Yoon, Jae Sung Shin, Du Hyun Beak

Proceedings Volume 6874, 68740H (2008) https://doi.org/10.1117/12.763243

KEYWORDS: Amplifiers, Mirrors, Laser scattering, Phase conjugation, Scattering, Laser systems engineering, Ferroelectric materials, Phase shift keying, Beam splitters, Laser stabilization

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Proceedings Article | 14 February 2007 Paper

Prepulse technique for preserving the pulse shape of the stimulated Brillouin scattering

Hong Jin Kong, Du Hyun Beak

Proceedings Volume 6454, 64540E (2007) https://doi.org/10.1117/12.701385

KEYWORDS: Acoustics, Scattering, Laser scattering, High power lasers, Mirrors, Beam splitters, Wave plates, Oscilloscopes, Optical components, Reflectivity

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Proceedings Article | 14 February 2007 Paper

The effect of a prepulse technique in the stimulated Brillouin scattering and its applications

Du Hyun Beak, Hong Jin Kong

Proceedings Volume 6454, 64540B (2007) https://doi.org/10.1117/12.700516

KEYWORDS: Reflectivity, Polarization, Scattering, Mirrors, Laser scattering, Wave plates, Beam splitters, Optical isolators, Quantum wells, Oscillators

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Showing 5 of 6 publications

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