Dr. Eric B. Maiken Profile

Dr. Eric B. Maiken

Scientist

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 5 April 2007 Paper

Scatterometry characterization of polysilicon gate profiles in a 90 nm logic process

E. Maiken

Proceedings Volume 6518, 651851 (2007) https://doi.org/10.1117/12.724208

KEYWORDS: Scatterometry, Scanning electron microscopy, Critical dimension metrology, Cadmium, Semiconducting wafers, Scatter measurement, Databases, Logic, Capacitance, Data modeling

Read Abstract +

Proceedings Article | 2 June 2003 Paper

Determination of lithography process control metrics by spectroscopic scatterometry

Eric Maiken, G. Raghavendra, Carmen Morales, Bryan Choo

Proceedings Volume 5038, (2003) https://doi.org/10.1117/12.485038

KEYWORDS: Semiconducting wafers, Scatterometry, Finite element methods, Databases, Scanning electron microscopy, Reflectivity, Lithography, Data modeling, Critical dimension metrology, Process control

Read Abstract +

Proceedings Article | 16 July 2002 Paper

Complementary use of scatterometry and SEM for photoresist profile and CD determination

Yuya Toyoshima, Isao Kawata, Yasutsugu Usami, Yasuhiro Mitsui, Apo Sezginer, Eric Maiken, Kin-Chung Chan, Kenneth Johnson, Dean Yonenaga

Proceedings Volume 4689, (2002) https://doi.org/10.1117/12.473458

KEYWORDS: Scatterometry, Scanning electron microscopy, Semiconducting wafers, Photoresist materials, Scatter measurement, Critical dimension metrology, Process control, Databases, Metrology, Cadmium

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years