Dr. Evgeny V. Erofeev
at Micran
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 8 January 2013 Paper
Proceedings Volume 8700, 87000M (2013) https://doi.org/10.1117/12.2016911
KEYWORDS: Copper, Gallium arsenide, Hydrogen, Gold, Resistance, Silicon, Metals, Annealing, Palladium, Scanning electron microscopy

Proceedings Article | 3 January 2013 Paper
Proceedings Volume 8700, 870005 (2013) https://doi.org/10.1117/12.2016882
KEYWORDS: Hydrogen, Germanium, Copper, Thin films, Resistance, Annealing, Gallium arsenide, Scanning electron microscopy, Diffusion, Solid state physics

Proceedings Article | 26 February 2010 Paper
E. Erofeev, V. Kagadei
Proceedings Volume 7521, 75210K (2010) https://doi.org/10.1117/12.853639
KEYWORDS: Annealing, Hydrogen, Resistance, Germanium, Nitrogen, Chemical species, Gold, Scanning electron microscopy, Gallium arsenide, Copper

Conference Committee Involvement (1)
The International Conference “Micro- and Nanoelectronics – 2012”
1 October 2012 |
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