Dr. Fan Yang Profile

Dr. Fan Yang

at Institute of Optics and Electronics

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Publications (6)

Proceedings Article | 6 February 2019 Paper

Double-beam laser interference lithography based on optical field modulation

Fuping Peng, Wei Yan, Fan Yang, Fanxing Li

Proceedings Volume 10842, 108421C (2019) https://doi.org/10.1117/12.2510947

KEYWORDS: Modulation, Lithography, Phase shift keying, Optics manufacturing, Laser applications, Wavefronts, Etching, Electron beam lithography, Laser development, Polarization

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Proceedings Article | 30 January 2019 Paper

Dynamic three-dimensional shape measurement based on light field imaging

Fan Yang, Wei Yan, Peng Tian, Fanxing Li, Fuping Peng

Proceedings Volume 10841, 108410D (2019) https://doi.org/10.1117/12.2510920

KEYWORDS: 3D image processing, 3D metrology, Image processing, Optical testing, Imaging systems, Sensors, Cameras, 3D acquisition, Digital image processing, Calibration

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Proceedings Article | 25 October 2016 Paper

Positioning control system of three-dimensional wafer stage of lithography

Peng Tian, Wei Yan, Fan Yang, Fanxing Li, Song Hu

Proceedings Volume 9685, 96850T (2016) https://doi.org/10.1117/12.2244874

KEYWORDS: Lithography, Control systems, Semiconducting wafers, Clocks, Photomasks, Process control, Stepper motor drivers, Data communications, Telecommunications, Camera shutters

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Proceedings Article | 9 June 2006 Paper

Polarization analysis for laser optical system

Fan Yang, Zhiqiang Huang, Tingwen Xing

Proceedings Volume 6149, 614913 (2006) https://doi.org/10.1117/12.674227

KEYWORDS: Mirrors, Dielectric polarization, Laser optics, Polarization, Optical coatings, Thin films, Optical design, Point spread functions, Laser systems engineering, Reflection

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Proceedings Article | 8 June 2006 Paper

Performance of the PSD-based Hartmann-Shack wavefront sensor

Kai Chen, Zeping Yang, Ende Li, Haiying Wang, Fan Yang, Yudong Zhang

Proceedings Volume 6018, 60180V (2006) https://doi.org/10.1117/12.669360

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Showing 5 of 6 publications

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