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Fanrong Feng
at Soochow Univ
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Publications (1)
Proceedings Article | 6 November 2015 Paper
Method for the measurement of surface-relief grating’s profile using initial phase of diffraction wave
Fanrong Feng, Jianhong Wu, Fei Gao
Proceedings Volume 9667, 96670B (2015) https://doi.org/10.1117/12.2197989
KEYWORDS: Diffraction gratings, Diffraction, Photoresist materials, Atomic force microscopy, Dielectrics, Ion beams, Scanning electron microscopy, MATLAB, Interferometers, Spatial frequencies
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