Fred C. M. Couweleers
at MAPPER Lithography
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 26 March 2013 Paper
N. Vergeer, L. Lattard, G. de Boer, F. Couweleers, D. Dave, J. Pradelles, J. Bustos
Proceedings Volume 8680, 86801E (2013) https://doi.org/10.1117/12.2011402
KEYWORDS: Optical alignment, Semiconducting wafers, Sensors, Reflectivity, Reflection, System on a chip, Lithography, Wafer-level optics, Silicon, Maskless lithography

Proceedings Article | 30 May 2003 Paper
Fred Couweleers, Oystein Skotheim, Helene Schulerud, Kristin Kaspersen
Proceedings Volume 5144, (2003) https://doi.org/10.1117/12.500056
KEYWORDS: Cameras, Projection systems, Image processing, Inspection, Calibration, Fringe analysis, Time metrology, Phase measurement, Imaging systems, Structured light

Proceedings Article | 6 September 1999 Paper
Proceedings Volume 3739, (1999) https://doi.org/10.1117/12.360167
KEYWORDS: Polishing, Surface finishing, Head, Mirrors, Magnetism, Spatial frequencies, Deflectometry, Optics manufacturing, Scattering, Multi-element lenses

Proceedings Article | 23 August 1996 Paper
Proceedings Volume 2774, (1996) https://doi.org/10.1117/12.246699
KEYWORDS: Mirrors, Scanners, 3D scanning, Laser scanners, Inspection, 3D image processing, 3D metrology, Sensors, Polygon scanners, Process control

Proceedings Article | 19 January 1996 Paper
Jef Horijon, Willem van Amstel, Fred Couweleers, Wilco Ligthart
Proceedings Volume 2599, (1996) https://doi.org/10.1117/12.230375
KEYWORDS: Mirrors, Inspection, 3D scanning, Laser scanners, Scanners, Sensors, 3D metrology, Polygon scanners, Electronics, 3D image processing

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