Dr. Gazi M. Huda
Senior Application Engineer at Siemens EDA
SPIE Involvement:
Author
Area of Expertise:
Plasmonics , Nanoparticle absorption , AFM probe , Finite Element Method , Evanescent Wave
Profile Summary

Established numerical finite element method (FEM) simulations representing the first realistic analysis of optical absorption in a nanoparticle-nanoprobe system, which are used in nanofabrication and material processing
Investigated the nanoscale heating under laser illumination, deformation of nanostructure, and nanoscale thermometry with the help of Raman signal
Compared experimental results of localized surface plasmon resonance bio sensors with Comsol simulations
Benchmarked discrete dipole approximation with surface interaction simulation methods with FEM, along with finite difference time domain (FDTD) methods
Publications (3)

Proceedings Article | 23 March 2020 Paper
Harold Mendoza, Gazi Huda
Proceedings Volume 11328, 1132819 (2020) https://doi.org/10.1117/12.2551698
KEYWORDS: Etching, Optical proximity correction, Photomasks, Inspection, Scanning electron microscopy, Lithography, Back end of line, Front end of line, Optical lithography, Data processing

Proceedings Article | 16 October 2019 Presentation + Paper
Charles Whiting, Ingo Bork, Peter Buck, Robin Chia, Bharadwaj Durvasula, Daniel Hill, Gazi Huda, Ken Jantzen, Matthew Leuthold, Jianliang Li, Joerg Mellmann, Kushlendra Mishra, Jed Rankin, Nageswara Rao, Malavika Sharma, Rachit Sharma, Adam Smith, Michaela Wentz
Proceedings Volume 11148, 1114805 (2019) https://doi.org/10.1117/12.2538347
KEYWORDS: Photomasks, Data modeling, Optical proximity correction, Critical dimension metrology, Calibration, Lithography, Semiconducting wafers, Manufacturing, Opacity, Etching

Proceedings Article | 14 March 2013 Paper
Proceedings Volume 8619, 86191F (2013) https://doi.org/10.1117/12.2002619
KEYWORDS: Absorption, Gold, Electroluminescent displays, Nanoparticles, Particles, Dielectrics, Surface plasmon polaritons, Metals, Silicon, Oscillators

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