Prof. Gerard D. O'Sullivan Profile

Prof. Gerard D. O'Sullivan

Professor at Univ College Dublin

SPIE Involvement:

Author

Publications (25)

Proceedings Article | 17 May 2017 Paper

Paper

XUV generation from the interaction of pico- and nanosecond laser pulses with nanostructured targets

Ellie Floyd Barte, Ragava Lokasani, Jan Proska, Lucie Stolcova, Oisin Maguire, Domagoj Kos, Paul Sheridan, Fergal O’Reilly, Emma Sokell, Tom McCormack, Gerry O’Sullivan, Padraig Dunne, Jiri Limpouch

Proceedings Volume 10243, 1024315 (2017) https://doi.org/10.1117/12.2265984

KEYWORDS: Plasmas, Laser energy, Silicon, Pulsed laser operation, Semiconductor lasers, Extreme ultraviolet, Plasma, Tin, Extreme ultraviolet lithography, Nd:YAG lasers, Nanostructures, Laser applications, Spectroscopy

Read Abstract +

Proceedings Article | 14 May 2015 Paper

Paper

Spectra of plasmas of Ru, Rh, Pd and Mo produced with nanosecond and picosecond laser pulses

Ragava Lokasani, Elaine Long, Paul Sheridan, Patrick Hayden, Fergal O'Reilly, Padraig Dunne, Akira Endo, Jiri Limpouch, Gerry O'Sullivan

Proceedings Volume 9514, 95141B (2015) https://doi.org/10.1117/12.2176551

KEYWORDS: Molybdenum, Plasmas, Palladium, Rhodium, Ruthenium, Ions, Picosecond phenomena, Extreme ultraviolet, X-rays, Lithography

Read Abstract +

Proceedings Article | 11 December 2012 Paper

Paper

Investigating the effects of laser intensity and pulse duration on 6.7-nm BEUV emission from Gadolinium plasma

Thomas Cummins, Takamitsu Otsuka, Noboru Yugami, Weihua Jiang, Akira Endo, Bowen Li, Colm O'Gorman, Padraig Dunne, Emma Sokell, Gerry O'Sullivan, Takeshi Higashiguchi

Proceedings Volume 8678, 86780C (2012) https://doi.org/10.1117/12.2015164

KEYWORDS: Plasma, Picosecond phenomena, Ions, Pulsed laser operation, Gadolinium, Extreme ultraviolet, Nd:YAG lasers, Reflectivity, Time metrology, Extreme ultraviolet lithography

Read Abstract +

SPIE Journal Paper | 29 May 2012

Development of laser-produced plasma sources for extreme ultraviolet lithography

Gerard O'Sullivan, Bowen Li

JM3, Vol. 11, Issue 02, 021108, (May 2012) https://doi.org/10.1117/12.10.1117/1.JMM.11.2.021108

KEYWORDS: Plasma, Laser development, Gadolinium, Tin, Ions, Extreme ultraviolet lithography, Gas lasers, Nd:YAG lasers, Extreme ultraviolet, Cerium

Read Abstract +

Proceedings Article | 23 March 2012 Paper

Paper

Laser-produced plasma UTA emission in 3-7nm spectral region

Takeshi Higashiguchi, Takamitsu Otsuka, Noboru Yugami, Weihua Jiang, Akira Endo, Bowen Li, Colm O'Gorman, Thomas Cummins, Deirdre Kilbane, Padraig Dunne, Gerard O'Sullivan

Proceedings Volume 8322, 83222J (2012) https://doi.org/10.1117/12.916308

KEYWORDS: Plasma, Bismuth, Ions, Extreme ultraviolet, Pulsed laser operation, Picosecond phenomena, Microscopes, Mirrors, X-rays, Tin

Read Abstract +

Proceedings Article | 23 March 2012 Paper

Paper

A 6.7-nm beyond EUV source as a future lithography source

Takamitsu Otsuka, Bowen Li, Colm O'Gorman, Thomas Cummins, Deirdre Kilbane, Takeshi Higashiguchi, Noboru Yugami, Weihua Jiang, Akira Endo, Padraig Dunne, Gerard O'Sullivan

Proceedings Volume 8322, 832214 (2012) https://doi.org/10.1117/12.916351

KEYWORDS: Extreme ultraviolet, Plasmas, Gadolinium, Pulsed laser operation, Ions, Nd:YAG lasers, Lithography, Tin, EUV optics, Carbon dioxide lasers

Read Abstract +

Proceedings Article | 28 September 2011 Paper

Paper

Characterization of broadband emission around 40 nm from potassium plasma

Hiromitsu Terauchi, Mami Yamaguchi, Takamitsu Otsuka, Takeshi Higashiguchi, Noboru Yugami, Toyohiko Yatagai, Rebekah D'Arcy, Padraig Dunne, Gerard O'Sullivan

Proceedings Volume 8139, 81390U (2011) https://doi.org/10.1117/12.892899

KEYWORDS: Plasma, Potassium, Extreme ultraviolet, Ions, Spectroscopy, Pulsed laser operation, Capillaries, Contamination, Light sources, Beam controllers

Read Abstract +

Proceedings Article | 28 September 2011 Paper

Paper

Shorter wavelength EUV source around 6.X nm by rare-earth plasma

Takamitsu Otsuka, Deirdre Kilbane, Thomas Cummins, Colm O'Gorman, Padraig Dunne, Gerry O'Sullivan, Weihua Jiang, Akira Endo, Takeshi Higashiguchi, Noboru Yugami

Proceedings Volume 8139, 81390T (2011) https://doi.org/10.1117/12.892897

KEYWORDS: Plasma, Extreme ultraviolet, Gadolinium, Ions, Terbium, Pulsed laser operation, Nd:YAG lasers, Solids, Mirrors, Carbon dioxide lasers

Read Abstract +

Proceedings Article | 14 September 2011 Paper

Paper

Scaling of laser produced plasma UTA emission down to 3 nm for next generation lithography and short wavelength imaging

Bowen Li, Akira Endo, Takamitsu Otsuka, Colm O'Gorman, Thomas Cummins, Tony Donnelly, Deirdre Kilbane, Weihua Jiang, Takeshi Higashiguchi, Noboru Yugami, Padraig Dunne, Gerry O'Sullivan

Proceedings Volume 8139, 81390P (2011) https://doi.org/10.1117/12.892513

KEYWORDS: Plasma, Extreme ultraviolet, Gadolinium, Ions, Carbon dioxide lasers, Pulsed laser operation, Tin, Lithography, Mirrors, Solids

Read Abstract +

Proceedings Article | 8 April 2011 Paper

Paper

Understanding the behavior of laser-produced tin plasma by time-resolved spectroscopy and simulations of their spectra

I. Kambali, T. McCormack, E. Scally, J. White, F. O'Reilly, P. Sheridan, G. O'Sullivan

Proceedings Volume 7969, 79692P (2011) https://doi.org/10.1117/12.878869

KEYWORDS: Tin, Plasma, Extreme ultraviolet, Ions, Spectrographs, Pulsed laser operation, Satellites, Optical simulations, Aluminum, Plasma spectroscopy

Read Abstract +

Proceedings Article | 25 August 2010 Paper

Paper

Compact extreme ultraviolet source by use of a discharge-produced potassium plasma for surface morphology application

Hiromitsu Terauchi, Mami Yamaguchi, Keisuke Kikuchi, Takamitsu Otsuka, Takeshi Higashiguchi, Noboru Yugami, Toyohiko Yatagai, Padraig Dunne, Gerry O'Sullivan

Proceedings Volume 7802, 78020T (2010) https://doi.org/10.1117/12.858603

KEYWORDS: Potassium, Extreme ultraviolet, Plasma, Ions, Electrons, Capillaries, Electrodes, Light sources, Spectroscopy, CCD cameras

Read Abstract +

Proceedings Article | 14 December 2009 Paper

Paper

Generation and characterization of spatially distributed laser produced plasma extreme ultraviolet source

Kuang-Po Chang, Oran Morris, Fergal O'Reilly, Padraig Dunne, Gerard O'Sullivan

Proceedings Volume 7520, 75202P (2009) https://doi.org/10.1117/12.839648

KEYWORDS: Plasma, Extreme ultraviolet, Tin, Diffractive optical elements, EUV optics, Spectrographs, Extreme ultraviolet lithography, Absorption, Calibration, Diffraction

Read Abstract +

Proceedings Article | 3 June 2005 Paper

Paper

The evolution of 4D photoabsorption in tellurium with increasing ionisation

Lynn Gaynor, Nicola Murphy, Anthony Cummings, Gerry O'Sullivan, Michael Lysaght, Patrick Hayden, Deirdre Kilbane, John Costello, Eugene Kennedy, Paul van Kampen

Proceedings Volume 5826, (2005) https://doi.org/10.1117/12.604836

KEYWORDS: Tellurium, Plasma, Absorption, Ionization, Extreme ultraviolet, Oscillators, Tungsten, Spectroscopy, Chemical species, Ions

Read Abstract +

Proceedings Article | 3 June 2005 Paper

Paper

4D inner shell excitations of I, Ba, and La in the 70-125 eV region

Nicola Murphy, Petru Niga, Lynn Gaynor, Gerry O'Sullivan

Proceedings Volume 5826, (2005) https://doi.org/10.1117/12.604644

KEYWORDS: Barium, Lanthanum, Ions, Plasma, Iodine, Extreme ultraviolet, Nd:YAG lasers, Spectrographs, Absorption, Electrons

Read Abstract +

Proceedings Article | 3 June 2005 Paper

Paper

EUV spectroscopy of xenon ions created using an electron beam ion trap

K. Fahy, E. Sokell, G. O'Sullivan, A. Cummings, A. Aguilar, J. Gillaspy, J. Pomeroy, J. Tan

Proceedings Volume 5826, (2005) https://doi.org/10.1117/12.605209

KEYWORDS: Ions, Electron beams, Xenon, Spectroscopy, Plasma, Extreme ultraviolet, Tin, Laser development, Extreme ultraviolet lithography, Ionization

Read Abstract +

Proceedings Article | 3 June 2005 Paper

Paper

Photoabsorption spectra of a laser produced Sn plasma

M. Lysaght, D. Kilbane, A. Cummings, N. Murphy, P. Dunne, G. O'Sullivan, L. Gaynor, P. van Kampen, J. Costello, E. Kennedy

Proceedings Volume 5826, (2005) https://doi.org/10.1117/12.604674

KEYWORDS: Tin, Plasma, Ions, Extreme ultraviolet, Xenon, Ionization, Absorption, Digital Light Processing, Pulsed laser operation, Oscillators

Read Abstract +

Proceedings Article | 3 June 2005 Paper

Paper

EUV laser produced plasma source development for lithography

Patrick Hayden, Paul Sheridan, Gerry O'Sullivan, Padraig Dunne, Lynn Gaynor, Nicola Murphy, Anthony Cummings

Proceedings Volume 5826, (2005) https://doi.org/10.1117/12.604853

KEYWORDS: Tin, Plasma, Extreme ultraviolet, Ceramics, Ions, Xenon, Pulsed laser operation, Extreme ultraviolet lithography, Lithography, Spectrographs

Read Abstract +

Proceedings Article | 6 May 2005 Paper

Paper

13.5 nm emission from composite targets containing tin

Patrick Hayden, Anthony Cummings, Lynn Gaynor, Nicola Murphy, Gerard O'Sullivan, Paul Sheridan, Emma Sokell, John White, Padraig Dunne

Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.601740

KEYWORDS: Tin, Plasmas, Ions, Spectrographs, Extreme ultraviolet, Chemical species, Grazing incidence, Calibration, Electrons, Nd:YAG lasers

Read Abstract +

Proceedings Article | 7 January 2004 Paper

Paper

Optimizing an EUV source for 13.5 nm

Gerry O'Sullivan, Anthony Cummings, Grainne Duffy, Padraig Dunne, Andrew Fitzpatrick, Paddy Hayden, Luke McKinney, Nicola Murphy, Dave O'Reilly, Emma Sokell, John White

Proceedings Volume 5196, (2004) https://doi.org/10.1117/12.504715

KEYWORDS: Plasmas, Tin, Ions, Extreme ultraviolet, Xenon, Pulsed laser operation, Picosecond phenomena, Absorption, Ionization, Chromium

Read Abstract +

Proceedings Article | 27 August 2003 Paper

Paper

VUV and soft x-ray emission from pre-plasmas irradiated with picosecond and femtosecond pulses

Adrian Murphy, John Hirsch, Deirdre Kilbane, Eugene Kennedy, Mohamed Khater, Jean-Paul Mosnier, Amit Neogi, Gerard O'Sullivan, Ciaran Lewis, S. Topping, Rob Clarke, Edwin Divall, Peta Foster, Chris Hooker, Andrew Langley, David Neely, Padraig Dunne, John Costello

Proceedings Volume 4876, (2003) https://doi.org/10.1117/12.464228

KEYWORDS: Plasma, X-rays, Vacuum ultraviolet, Picosecond phenomena, Pulsed laser operation, Copper, Spectroscopy, Femtosecond phenomena, Electro optics, Charge-coupled devices

Read Abstract +

Proceedings Article | 27 August 2003 Paper

Paper

Investigation of EUV sources for 13.5-nm operation

Grainne Duffy, Anthony Cummings, Padraig Dunne, Gerard O'Sullivan

Proceedings Volume 4876, (2003) https://doi.org/10.1117/12.463649

KEYWORDS: Tin, Xenon, Plasmas, Ions, Extreme ultraviolet, Pulsed laser operation, Mirrors, Lithography, Reflectivity, Semiconductors

Read Abstract +

Proceedings Article | 25 January 2000 Paper

Paper

Soft x-ray narrow-band laser plasma sources for nanotechnology

Ronan Faulkner, Gerard O'Sullivan, Dave O'Reilly, Padraig Dunne

Proceedings Volume 4064, (2000) https://doi.org/10.1117/12.375441

KEYWORDS: Plasma, X-rays, Barium, Cesium, Tin, Ions, Nd:YAG lasers, Nanotechnology, Picosecond phenomena, Glasses

Read Abstract +

SPIE Journal Paper | 1 December 1994

Extreme ultraviolet continuum emission from laser-generated plasmas and applications to spectroscopy

Gerard O'Sullivan, P. Carroll, James Conway, Padraig Dunne, Ronan Faulkner, Thomas McCormack, Cormac McGuinness, Paul van Kampen, Bernadette Weinmann

OE, Vol. 33, Issue 12, (December 1994) https://doi.org/10.1117/12.10.1117/12.184381

KEYWORDS: Plasmas, Extreme ultraviolet, Ions, Nd:YAG lasers, Laser applications, Chemical species, Pulsed laser operation, Strontium, Vacuum ultraviolet, Absorption

Read Abstract +

SPIE Journal Paper | 1 December 1994

Tunable narrowband soft x-ray source for projection lithography

Gerard O'Sullivan, Ronan Faulkner

OE, Vol. 33, Issue 12, (December 1994) https://doi.org/10.1117/12.10.1117/12.186840

KEYWORDS: Tin, Plasmas, Ions, Extreme ultraviolet, Nd:YAG lasers, Cesium, Tellurium, Absorption, Oxides, Barium

Read Abstract +

Proceedings Article | 1 September 1991 Paper

Paper

Laser-produced continua for studies in the XUV

P. Carroll, Gerard O'Sullivan

Proceedings Volume 1503, (1991) https://doi.org/10.1117/12.46953

KEYWORDS: Plasma, Ions, Absorption, Excimer lasers, Synchrotrons, Ionization, Metals, Samarium, Ytterbium, Pulsed laser operation

Read Abstract +

Showing 5 of 25 publications

Proceedings Volume Editor (3)

SPIE Conference Volume | 8 June 2005

Opto-Ireland 2005: Photonic Engineering

SPIE Conference Volume | 3 June 2005

Opto-Ireland 2005: Optical Sensing and Spectroscopy

SPIE Conference Volume | 18 March 2003

Opto-Ireland 2002: Optics and Photonics Technologies and Applications

Conference Committee Involvement (3)

Spectroscopy

4 April 2005 | Dublin, Ireland

Photon Management Research in Ireland

6 April 2004 | Dublin, Ireland

Optics Education

5 September 2002 | Galway, Ireland

SIGN IN TO:

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Advertisement

Advertisement