Guogui Deng
at Semiconductor Manufacturing International Corp
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 8 March 2016 Paper
Guogui Deng, Jingan Hao, Lihong Xiao, Bin Xing, Yuntao Jiang, Kaiting He, Qiang Zhang, Weiming He, Chang Liu, Yi-Shih Lin, Qiang Wu, Xuelong Shi
Proceedings Volume 9778, 97782C (2016) https://doi.org/10.1117/12.2220013
KEYWORDS: Overlay metrology, Process control, Etching, Chemical vapor deposition, Semiconductors, Integrated circuits, Critical dimension metrology, Stress analysis, Semiconducting wafers, Photoresist materials, Lithography, Oxides, Optical lithography

Proceedings Article | 19 March 2015 Paper
Guogui Deng, Jingan Hao, Bin Xing, Yuntao Jiang, Gaorong Li, Qiang Zhang, Liwan Yue, Yanlei Zu, Huayong Hu, Chang Liu, Manhua Shen, Shijian Zhang, Weiming He, Nannan Zhang, Yi-Shih Lin, Qiang Wu, Xuelong Shi
Proceedings Volume 9424, 94242I (2015) https://doi.org/10.1117/12.2086093
KEYWORDS: Critical dimension metrology, Scanning electron microscopy, Electron beams, Metals, Optical proximity correction, Inspection, Process control, Electron microscopes, Semiconductors, Control systems

Proceedings Article | 31 March 2014 Paper
Guogui Deng, Jingan Hao, Boxiu Cai, Bin Xing, Xin Yao, Qiang Zhang, Tianhui Li, Yi-Shih Lin, Qiang Wu, Xuelong Shi
Proceedings Volume 9052, 905229 (2014) https://doi.org/10.1117/12.2046308
KEYWORDS: Semiconducting wafers, Critical dimension metrology, Chlorine, Photomasks, Laser sources, Safety, Image processing, Fermium, Frequency modulation, Semiconductor manufacturing

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