Haopeng Huang
at Shanghai Institute of Optics and Fine Mechanics
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 14 July 2015 Paper
Proceedings Volume 9532, 95320D (2015) https://doi.org/10.1117/12.2186054
KEYWORDS: Diffraction gratings, Gold, Laser damage threshold, Diffraction, Absorption, Laser induced damage, Pulsed laser operation, Manufacturing, Photoresist materials, Distance measurement

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