Prof. Heinz J. Fissan Profile

Prof. Heinz J. Fissan

Director at Institut für Energie- und Umwelttechnik eV

SPIE Involvement:

Author

Publications (4)

Proceedings Article | 28 May 2009 Paper

Nanoparticle contamination control for EUVL-technology: especially for photomasks in carriers and scanners

Heinz Fissan, Christof Asbach, Thomas A. Kuhlbusch, Jing Wang, David Y. Pui, Se-Jin Yook, Jung Kim

Proceedings Volume 7364, 73640N (2009) https://doi.org/10.1117/12.821654

KEYWORDS: Particles, Photomasks, Atmospheric particles, Contamination, Scanners, Extreme ultraviolet lithography, Nanoparticles, Pellicles, Atmospheric modeling, Protactinium

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Proceedings Article | 22 March 2008 Paper

Controlled deposition of NIST-traceable nanoparticles as additional size standards for photomask applications

Jing Wang, David Pui, Chaolong Qi, Se-Jin Yook, Heinz Fissan, Erdem Ultanir, Ted Liang

Proceedings Volume 6922, 69220G (2008) https://doi.org/10.1117/12.756741

KEYWORDS: Particles, Silica, Atmospheric particles, Inspection, Quartz, Gold, Calibration, Standards development, Aerosols, Photomasks

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Proceedings Article | 19 November 2001 Paper

Synthesis and characterization of monosized SnOx nanoparticles for gas sensing applications

Heinz Fissan, Marcus Kennedy, F. Einar Kruis

Proceedings Volume 4590, (2001) https://doi.org/10.1117/12.454609

KEYWORDS: Nanoparticles, Particles, Oxygen, Thin films, Resistance, Atmospheric particles, Bioalcohols, Tin, Oxides, Transmission electron microscopy

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SPIE Journal Paper | 1 April 2000

Development of non-imaging optics for particle counters

J. Luo, A. Trampe, Heinz Fissan

OE, Vol. 39, Issue 04, (April 2000) https://doi.org/10.1117/12.10.1117/1.602455

KEYWORDS: Solar concentrators, Nonimaging optics, Light scattering, Reflection, Particles, Atmospheric particles, Optics manufacturing, Scattering, Optical proximity correction, Sensors

Conference Committee Involvement (1)

Smart Electronics, MEMS, BioMEMS, and Nanotechnology

3 March 2003 | San Diego, California, United States

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