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Iuliia Bykova
Test and Metrology Engineer at Eulitha AG
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Publications (2)
Proceedings Article | 10 April 2024 Presentation
300mm+ substrate UV/DUV low-cost, reliable periodic patterning solution for high-volume manufacturing
Kelsey Wooley, Harun Solak, Christian Dais, Francis Clube, Ahmed Mohammad, Iuliia Bykova, Thibault Seure, Mehdi Heydari, Matthew Wilson, Li Wang
Proceedings Volume PC12956, PC129560O (2024) https://doi.org/10.1117/12.3013328
KEYWORDS: Optical lithography, Semiconducting wafers, Photomasks, Lithography, High volume manufacturing, Photonics, Ultraviolet radiation, Standards development, Projection lithography, Deep ultraviolet
SPIE Journal Paper | 31 August 2018 Open Access
Correction of axial position uncertainty and systematic detector errors in ptychographic diffraction imaging
Lars Lötgering, Max Rose, Kahraman Keskinbora, Margarita Baluktsian, Gül Dogan, Umut Sanli, Iuliia Bykova, Markus Weigand, Gisela Schütz, Thomas Wilhein
OE, Vol. 57, Issue 08, 084106, (August 2018) https://doi.org/10.1117/12.10.1117/1.OE.57.8.084106
KEYWORDS: Sensors, Diffraction, Imaging systems, Detection and tracking algorithms, Convolution, Fourier transforms, Calibration, Visible radiation, Optical engineering, Spatial coherence
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