Ms. Jee-Eun Jung Profile

Jee-Eun Jung

at SAMSUNG Electronics Co Ltd

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Author

Publications (2)

Proceedings Article | 4 March 2008 Paper

SEM contour-based model OPC calibrated with optically sensitive patterns

Jee-Eun Jung, Mi-Kyeong Lee, Yong-Jin Cho, Sang-Ho Lee, Young-Seog Kang, Young-Kyou Park

Proceedings Volume 6925, 692516 (2008) https://doi.org/10.1117/12.772485

KEYWORDS: Scanning electron microscopy, Optical proximity correction, Calibration, Data modeling, Optical calibration, Image analysis, Critical dimension metrology, Process modeling, Feature extraction, Image processing

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Proceedings Article | 27 March 2007 Paper

Improving the model robustness for OPC by extracting relevant test patterns for calibration

Moon-Gyu Jeong, Sang-Ho Lee, Jee-Eun Jung, Chankyeong Hyon, Iljung Choi, Young-Seog Kang, Youngkyou Park

Proceedings Volume 6520, 652048 (2007) https://doi.org/10.1117/12.711806

KEYWORDS: Data modeling, Optical proximity correction, Calibration, Optical calibration, Model-based design, Statistical modeling, Optical lithography, Semiconducting wafers, Optical testing, Cadmium

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