Dr. Khaja Ahmad Shaik
at imec
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 20 March 2019 Presentation + Paper
Proceedings Volume 10962, 1096203 (2019) https://doi.org/10.1117/12.2515162
KEYWORDS: Resistance, Extreme ultraviolet, System on a chip, Optical lithography, Capacitance, Logic, Laser induced breakdown spectroscopy, Transistors, Fabrication

Proceedings Article | 20 March 2019 Presentation + Paper
Bharani Chava, Khaja Ahmad Shaik, Anne Jourdain, Sofiane Guissi, Pieter Weckx, Julien Ryckaert, Geert Van Der Plaas, Alessio Spessot, Eric Beyne, Anda Mocuta
Proceedings Volume 10962, 1096205 (2019) https://doi.org/10.1117/12.2514942
KEYWORDS: Metals, Logic, Standards development, Semiconducting wafers, Resistance, Clocks, Switches, Silicon, Chemical mechanical planarization, Device simulation

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