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Makoto Saito
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Publications (1)
Proceedings Article | 9 March 2024 Presentation
Low-pressure acidic ammonothermal (LPAAT) growth of large diameter nearly bowing-free GaN crystals
Shigefusa Chichibu, Kouhei Kurimoto, Quanxi Bao, Yutaka Mikawa, Makoto Saito, Daisuke Tomida, Tohru Ishiguro, Kohei Shima
Proceedings Volume PC12886, PC1288601 (2024) https://doi.org/10.1117/12.3001028
KEYWORDS: Gallium nitride, Crystals, Semiconducting wafers, Physical coherence, Manufacturing, Gallium, Electronic components, Chip manufacturing
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